In-Situ Products
To make integrated metrology (IM) a reality
there are no alternative on market today to RST
MultiMetrixs´s MS-FIS 200/300 is RST-based rack-mounted
module with a processor, hard drive, special cards and embedded software.
A sensor (or up to 125 sensors per tool) could be integrated into:
carrier, platen, chuck or attached to the mechanical stage.
Among module´s primary applications are in-situ process monitoring,
inspection and control.
At speed of 10,000+ measurements per second, it can measure thickness,
uniformity, resistivity, sheet resistance, and other properties with support for
Cu, Au, Ti, W, Ti nitride and other conductive films.
MS-FIS 200/300 is extremely important for the emerging 90nm and below
technology nodes for process matching in between tools and in cluster
tools between process chambers.
The module communicates via USB or Ethernet port with other computers and devices.
The IM module MS-FIS 200/300 does not occupy extra space (all modules have
footprint of load-port) and can keep production process in extremely narrow
window that will definitely improve yield and cut production time.
Additionally, it could be easily integrated for large size substrate measurements,
inspection and production control.
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