MultiMetrixs´line of metrology products utilize novel
Resonance Sensor Technology (RST) that was pioneered by MultiMetrixs
scientific and engineering team.
RST is based on the analysis of electromagnetic resonance by
utilizing proprietary data processing algorithm resulting in improved
throughput, sensitivity, and accuracy that significantly surpass
measurements derived using existing techniques.
Single and MultiSensor RST are unique innovative systems that can
span production process from BEOL to FEOL.
Among numerous applications RST based systems allow measurement
and inspection of bare wafers, thin and thick films, process matching
through entire chip fabrication process, wafer bump adhesion
inspection and IC logic testing to name a few.
The RST system´s versatile modular design is a key enabler for
manufacturers to solve metrology challenges including in-situ monitoring
and control during numerous production processes, ability to measure
stacks of conductive films and wafer edge exclusion zone inspection.
RST products are non-contact and non-distructive.
Partial list of applications that we have developed to date:
- In-Situ Process Control Solutions
- In-Line and Stand-Alone Solutions
- Multi Sensor Solutions
- Bump Adhesion Solutions
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