In-Situ Process Control Solutions:
Deposition
Today, in-situ film metrology has become enabling technology that allows
making real time process control a reality.
It significantly improves IC production management and increase
device manufacturing yields.
These measurements enable process engineers to monitor production
process from start to finish.
By integrating 49+ sensors with fully automated closed loop feed back
system into a deposition tools, manufacturer will in real time control
film deposition rate, thickness, uniformity and end point detection.
High speed of data acquisition will also enable manufacturers to
correct quality related problems in real time.
- Deposition
- Film Temperature Monitoring
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