MultiMetrixs provides flexible integrated metrology
solutions to enable on-tool Advanced Process Control (APC) and Fault
Detection & Classification in a factory wide APC architecture.
MultiMetrixs´ compact integrateable modules, in contrast
to stand-alone metrology, reduce wafer travel and eliminate bottleneck situations.
The MultiMetrixs´ RST is specially suited as an on-tool sensor
device for wafer level run-to-run control and process-to-process matching.
Almost instantaneously it can take measurements in up to 127 spots of
any conductive films´ resistivity, thickness, uniformity and stress before,
after or during the production process.
This way the MultiMetrixs´ RST serves as an automatic
Fault Detection and Control (FDC).
The system provides more data in a shorter time thus improving
yield and reducing scrap.
Also the risk of potential contamination is avoided.
The MultiMetrixs´ RST compact modules consist of three integral parts:
sensor(s) or multi-sensor inspection chuck, electronic hardware with installed
software and connecting cables.
They can be easily integrated into any process tool, sorter or EFEM.
MultiMetrixs will provide customized integration solutions to any
new process tool or will retrofit any used tool for 200 mm or 300 mm
process equipment at existing IC factories.
- CMP Solutions
- Deposition Solutions
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