MultiMetrixs developed a wide range of unique stand-alone
and process control metrology solutions.
They range from measuring thickness and uniformity of
single or stacks of conductive films to defect inspection
of wafer edge exclusion zone.
Our main focus is to provide end-users with most sophisticated
metrology, inspection and control solutions for widest range of applications.
Since Resonance Sensor Technology is relatively new metrology
method we continue to develop new applications for both FEOL and BEOL.
Partial list of applications that we have developed to date:
- In-Situ Process Control Solutions
- In-Line and Stand-Alone Solutions
- Multi Sensor Solutions
- Bump Adhesion Solutions
Modern Technology, Superior Products, Real-World Solutions
We are confident that you will find the RST-based products and solutions
to be far superior to any other existing non-contact technique
in the electrical arena.
The table below shows how the modern Resonance Sensor Technology
products and solutions compare to other existing products based on
your real-world requirements.
|
|
|
Comparison of Metrology Methods
|
|
Metrology Method
|
Company
|
Spot Size
|
Speed
|
Sensitivity
|
Accuracy
|
Cost
|
COO
|
Footprint
|
|
RST
|
MultiMetrixs
|
|
|
|
|
|
|
|
|
Capacitive
|
ADE
|
I
|
S
|
I
|
I
|
S
|
I
|
S
|
|
Eddy Current
|
Andrew NTD, ULVAC, Napson
|
W
|
I
|
W
|
W
|
S
|
I
|
S
|
|
4-Point Probe
|
KLA-Tencor, SSM, CDE, Napson, Capres
|
W
|
W
|
I
|
I
|
S
|
I
|
S
|
|
X-ray
|
Siemens, Jordan Valley, Rigaku
|
I
|
W
|
S
|
S
|
W
|
W
|
W
|
|
Optoacoustics
|
Rudolph Technology, Philips-AMS
|
I
|
W
|
I
|
I
|
W
|
W
|
W
|
|
Ellipsometry
|
ThermaWave, Horiba,
KLA-Tencor
|
I
|
I
|
S
|
S
|
W
|
W
|
W
|
|
Reflectrometry
|
Nanometrics,
Nova Instrument
|
I
|
S
|
S
|
S
|
I
|
I
|
I
|
|
|
Legend:
|
Similar (S)
±10%
|
Inferior (I)
> 15% - 100%
|
Much Worse (W)
> 100%
|
|
