MultiMetrixs Edge Grippers:
Standard Features Overview
Soft-touch mechanism
Our patented soft-touch mechanism sets apart MultiMetrixs´ Intelligent
Edge Grippers (IEGs) from its competitors´.
This unique feature means that gripping prism do not shoot on the wafer, but gently touch (hug) the wafer edge preventing any particles generation. The slightest contact between gripper tips and the wafer edge sends a signal to the device control mechanism, which in turn calculates and applies an applicable pre-programmed gripping force. Regardless of wafer diameter deviations, this feature enables secure hold with constant gripping force.
Programmable gripping force
All of MultiMetrixs´ edge grippers feature an active and
programmable gripping force, enabling you to utilize the same tool
for both thick and thin wafers.
With its closed loop force-feedback, the mechanism prevents wafer
stress while holding the wafer gently and securely.
This feature can help achieve higher throughput, by allowing
optimization of gripping force while factoring in variables such as
robot speed and wafer stiffness.
Motion control and communication
The electrical drives used in IEGs are significantly more reliable than
pneumatic ones; they are cleaner in operation and do
not require an exhaust line.
For precise motion control, our edge grippers use electrical step
motors and drive-box enclosed miniature controllers.
The electrical step motors enable control of gripping force,
operation of multiple wafer grippers on same robotic arm, and status
definition of each individual gripper.
Safe lock
In case of EMO or power disconnect, the safe lock feature will automatically
lock the gripping prisms in place holding the wafer securely.
After the power is resumed, the mechanism verifies wafer presence
preventing accidental wafer drop.
Rotating distal gripping tips
Rotating distal gripping tips is a feature that allows for random access
of 200mm wafers into small pitch cassette, boat or any narrow gates.
In 300mm edge grippers this is an optional feature.
Modular design
IEG modular design enables MultiMetrixs to manufacture edge grippers with
superb reliability qualities. Additionally, the modular design reduces our
manufacturing and testing time, enabling you to receive your custom-designed
IEGs within two months of product order.
To date, MultiMetrixs has built and successfully integrated over a
dozen various designs into customers´ wafer handling solutions.
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